PVD and Plasma Systems

Components manufactured from boron nitride sintered bodies provide ideal shielding and electrical insulation solutions for PVD and Plasma systems. HeBoSint® components such as insulating shrouds and rails, target frames, protective tubes, shields and liners as well as insulators ensure that the PVD arc remains constrained towards the target, preventing equipment damage. Any unwanted metal deposits that can still arise in PVD and Plasma systems can be easily removed from surfaces that have been previously coated using our HeBoCoat® liquid suspensions.

In parallel to our well proven HeBoSint® product range for all PVD-ARC, Plasma und CVD systems we are able to offer precision machined components manufactured to customer specific requirements using our extensive in-house capabilities.

Our product recommendations for PVD and plasma systems applications PVD:

HeBoCoat® PL-E 125

HeBoCoat® PL-E 125 is a boron nitride coating in an ethanol base with the addition of inorganic

HeBoCoat® PL-W 130

HeBoCoat® PL-W 130 is a water-based boron nitride coating of median viscosity

HeBoCoat® SL-E 125

HeBoCoat® SL-E 125 is a boron nitride spray supplied in an easy-to-use aerosol can.

HeBoSint® Shrouds and Rails

HeBoSint® shrouds and rails help increase the productivity

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